Abstract
The on line measurement of carbon nanotube growth rate during chemical vapor deposition (CVD) process has been successfully realized through conventional instruments in this article. A micro fluidized bed (MFB) reactor has been constructed with simple hardware components in order to obtain a chemical kinetic model by using soft sensor technology. The experimental results have been found to agree well with the theoretical predictions obtained from the proposed soft sensor model, hence a useful approach to the real-time measurement in CVD process has been provided.
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