Abstract
In this paper, a new approach for enhancing the temperature sensitivity of a resonant MEMS thermometer, based on parametric modulation, is proposed. By periodically modulating the effective stiffness of a standard clamped-clamped beam (C-C beam), which is used as a proof-of-concept resonant MEMS thermometer, it is possible to create a virtual energy coupling between two fundamental modes of vibration. Through this energy transfer link, one particular mode (ideally high sensitivity) can be transferred to the vicinity of another mode (ideally low noise), thus creating an operating region where both increased sensitivity and low noise can be achieved. As a starting point, a sensitivity enhancement of up to 126% can be achieved in this particular study, while not deteriorating the readout noise floor. A noise floor of 19.7 μ K/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> has been achieved. Potentially, this approach could be extended to other structures, or be used to decrease sensitivity to temperature fluctuations as well.
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