Abstract
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip. The sensor has a simple structure, consisting of a hollow metallic cylindrical cavity along with access waveguides. A detailed analysis of the proposed sensor is presented. Simulation with 3D ray tracing shows that an integrating cylinder with 4 mm diameter gives an equivalent optical path length of 3.5 cm. The sensor is fabricated using Deep Reactive Ion Etching (DRIE) and wafer bonding. The fabricated sensor was evaluated by performing a CO2 concentration measurement, showing a limit of detection of ∼100 ppm. The response time of the sensor is only ∼2.8 s, due to its small footprint. The use of DRIE-based waveguide structures enables mass fabrication, as well as the potential co-integration of flip-chip integrated midIR light-emitting diodes (LEDs) and photodetectors, resulting in a compact, low-power, and low-cost NDIR CO2 sensor.
Highlights
CO2 gas sensing is receiving increasing attention in both industry and academia, due to its widespread applications such as in air-quality monitoring [1], greenhouse farming [2] and industrial process control [3]
In this paper, we propose a novel, miniaturized non-dispersive infrared (NDIR) CO2 sensor implemented on a silicon chip
The European Union introduced a gradual ban on the usage of fluorinated gases in mobile air conditioning systems (MAC) for environmental and fire safety reasons [5]
Summary
CO2 gas sensing is receiving increasing attention in both industry and academia, due to its widespread applications such as in air-quality monitoring [1], greenhouse farming [2] and industrial process control [3]. For air-quality monitoring and greenhouse farming, a detection limit and accuracy of sub-100 ppm is needed, for leak detection in mobile air conditioning systems, a detection limit of a few thousands ppm is sufficient, yet a fast response time is essential since the CO2 concentration in the cabin increases quite rapidly as previously discussed. Electrochemical sensors measure the CO2 concentration by measuring a change in the electrical properties of materials induced by the CO2 adsorption They have the advantage of being low cost and compact [11,12,13,14]. NDIR sensors tend to be bulky as a long (typically several cm) interaction length is required to achieve ppm level detection [18,19], and they are expensive as they are based on discrete co-assembled optical elements, which limit their application in price and size sensitive markets. The fast response of the sensor is due to its small size for gas to diffuse
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