Abstract
In this work, the effect of laser-induced nanostructuring of transparent indium tin oxide (ITO) electrodes on flexible glass is investigated. Multi-electrode arrays (MEA) for electrical and optical characterization of biological cells were fabricated using standard MEMS technologies. Optimal sputter parameters concerning oxygen flow, sputter power and ambient pressure for ITO layers with both good optical and electrical properties were determined. Afterwards, coherent sub-20nm wide and 150nm deep nanocuts of many micrometers in length were generated within the ITO electrodes by a sub-15 femtosecond (fs) pulsed laser. The influence of laser processing on the electrical and optical properties of electrodes was investigated. The electrochemical impedance of the manufactured electrodes was measured before and after laser modification using electrochemical impedance spectroscopy. A small reduction in electrode impedance was observed. These nanostructured electrodes show also polarizing effects by the visible spectrum.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
