Abstract
A vertical-structure quantum well (QW) diode based monolithic multicomponent system is for the first time implemented by integrating a light-emitting diode (LED), waveguide, and photodiode (PD) on a metal-bonded III-nitride-on-silicon platform. Two identical QW-diodes that are manufactured using all existing standard fabrication processes function as the LED and PD respectively, and waveguides are formed to establish on-chip optical link between the LED and PD. The PD absorbs the light from the adjacent LED coupled through the waveguide to induce a photocurrent that is proportional to the injection current of the LED, leading to an on-chip power monitoring system. One PD can monitor multiple LEDs simultaneously by identifying individual differences of the system from the superimposed signals using signal extraction approach.
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