On-chip micro-electromagnets for magnetic-based bio-molecules separation

Abstract

This paper reports a comprehensive theoretical, finite element and measurement analysis of different designs of planar micro-electromagnets for bio-molecular manipulation. The magnetic field due to current flowing in complex shapes of current-carrying conductors have been calculated analytically, simulated using finite-element analysis (FEA), and measured using the superconducting quantum interference device technique (SQUID). A comparison of the theoretical and measured magnetic field strength and patterns is presented. The planar electromagnets have been fabricated using patterned Al 2μm thick. The aim of the study is to explore and optimize the geometrical and structural parameters of planar electromagnets that give rise to the highest magnetic fields and forces for magnetic micro-beads manipulation. Magnetic beads are often used in biochemical assays for separation of bio-molecules. Typical beads are 0.2–10μm in diameter and have superparamagnetic properties. Increasing the intensity of the magnetic field generated by a coil by injection a larger current is not the most suitable solution as the maximum current is limited by Joule heating. Consequently, in order to maximize the field for a given current, one should optimize the geometry of the coil, as this is an extremely significant factor in determining the magnetic field intensity in 2D planar designs. The theoretical and measured results of this work show that the meander micro-electromagnet with mesh-shaped winding profile produces the strongest magnetic field (about 2.7μT for a current intensity of 6mA) compared with other meander designs, such as the serpentine and rosette-shaped ones. The magnetic fields of these three types of meander-shaped micro-electromagnets were compared theoretically with that produced by a spiral micro-electromagnet whose technological realization is more complicated and costly due to the fact that it requires an additional insulation layer with a contact window and a second patterned metal layer as a via. Nevertheless, the spiral design produces a much stronger magnetic field up to five times larger than that of the mesh-shaped micro-electromagnet for the same current and electromagnet area. The measured results strongly agree with these conclusions resulted from the theoretical analysis. The results presented in this paper provide a solid and useful basis for the design of a micro-fluidic bio-molecule separation and detection system using magnetic fields and magnetic beads.