Abstract
As electronic computing is facing increasing challenges towards continued scaling and improvement in performance, mechanical computing has started to attract growing interests. Leveraging the mechanical degree of freedom in solid state devices, micro/nano-electromechanical systems (MEMS/NEMS) provide alternative solutions for future computing and memory systems with ultralow power consumption, compatibility with harsh environments, and high reconfigurability. In this review, we survey MEMS/NEMS-enabled memories and logic processors, and analyze the prospects and challenges for future on-chip mechanical computing.
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