Abstract

Cascaded nanophotonic devices play a vital role in all-optical connection, all-optical computation and all-optical network. However, there is almost no effective method for the direct design of on-chip cascaded nanophotonic devices, since current study of nanophotonic devices mostly focuses on single device. Here, on-chip cascaded nanophotonic devices are designed based on an intelligent algorithm by combining genetic algorithm, simulated annealing algorithm and finite element method for the first time, and verified experimentally by using silicon-based planar structures. The cascaded devices consist of a bandpass filter and a wavelength router operating in optical communication range. The operation bandwidth of the bandpass filter is 408 nm with transmission more than 80%, within which the communication wavelengths of 1,300 nm and 1,550 nm are routed into different output ports through the wavelength router component. The footprint is only 3.62 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for the bandpass filter and only 2.56 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for the wavelength router, which are easy for integration with planar structures and ultrasmall size. This work provides a highly-efficient scheme for the realization of on-chip cascaded nanophotonic devices on the same chip, and lays a foundation for the realization of photonic chip based on intelligent algorithm.

Highlights

  • I NTEGRATED nanophotonic devices are widely used in all-optical connection, all-optical computing, and all-optical network [1]–[3], etc

  • The cascaded bandpass filter and wavelength router are designed based on the intelligent algorithm (IA), which consists of genetic algorithm (GA), simulated annealing algorithm (SAA) and finite element method (FEM)

  • The entire sample fabrication process is performed on a SOI plate, and etched using the scanning electron microscopy (SEM)/focused ion beam (FIB) system (ZEISS Crossbeam 540)

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Summary

Introduction

I NTEGRATED nanophotonic devices are widely used in all-optical connection, all-optical computing, and all-optical network [1]–[3], etc. Nanoscale photonic devices are essential components for chip integration. They have great application potential in many research and technical fields such as highperformance computer, optical communication, quantum information and artificial intelligence, due to the broad bandwidth and large information capacity. No effective method has been found to design On-chip cascaded bandpass filter and wavelength router directly, which seriously restricts the development of integration for two or more nanophotonic devices. While cascading is an unavoidable step for integration, it is urgent to develop an efficient method for design of on-chip cascaded nanophotonic devices [13]

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