Abstract
Ti/Al/Pt/Au and V/Al/Pt/Au ohmic contacts were studied on n-Al0.44Ga0.56N and n-Al0.6Ga0.4N. Optimised V/Al/Pt/Au contacts provided lower resistance than did Ti/Al/Pt/Au contacts, which are commonly used on less Al-rich n-AlGaN. Specific contact resistances of 1×10−5 Ω · cm2 and 4×10−5 were achieved on n-Al0.44Ga0.56N and n-Al0.6Ga0.4N, respectively.
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