Ohmic Contact Behavior of Pt/Ni/Au to p-ZnO

Abstract

ABSTRACTThe electrical properties of single Pt (30 nm) and Pt (30 nm)/Ni (30nm)/Au(50nm) multilayer contacts on moderately doped p-ZnO (Na = 5.0 × 1017 /−3) were investigated. Although linear current-voltage characteristics were observed for all samples, a sample that was annealed for 1 min at a temperature above 500 °C resulted in an ohmic contact with good characteristics. The best ohmic contact to p-type ZnO was obtained using a Pt/Ni/Au multilayer contact that was annealed at 600 °C for 1 min under a N2 ambient, showing a specific contact resistance Rc of 1.97 × 10−5 Ω cm2. The fundamental mechanisms for the lower contact resistivity of Pt/Ni/Au contacts are discussed based on glancing angle x-ray diffraction results and Auger depth profile analysis of the multilayer alloying process. Furthermore, we fabricated a ZnO p-n homojunction using Pt/Ni/Au and Ti/Au as the p-type and n-type ohmic contact metal, respectively. The threshold voltage was determined to be about 3.7 V, comparable to the bandgap energy of ZnO.