Abstract
Abstract. The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. With special design and manufacturing approaches mounting stress-insensitive sensors with high linearity, excellent offset stability, low hysteresis and low sensitivity changes over the entire temperature range were developed. At the moment, the sensors are tested till 300 °C at wafer level and between 135 and 210 °C as a first-level package.
Highlights
The pressure is one of the main values for the industrial process and control technology
Every piece of complex processing equipment is equipped with at least one pressure sensing element which can be seen in the sales volume of around 1 × 109 microelectromechanical pressure sensors (MEMS) in 2015 (Yole Développement, 2015)
The leakage current was measured over the entire operating temperature range in comparison to a conventional high-performance pressure sensor die that was processed in our own fabrication line as a reference sensor based on junction isolation in the same pressure operating range
Summary
The pressure is one of the main values for the industrial process and control technology. Every piece of complex processing equipment is equipped with at least one pressure sensing element which can be seen in the sales volume of around 1 × 109 microelectromechanical pressure sensors (MEMS) in 2015 (Yole Développement, 2015). The goal of our research was to develop a silicon-based piezoresistive pressure sensor that delivers a full measurement capability up to 300 ◦C without a loss of sensor performance in the standard temperature range. With such a sensing element it is possible to build smaller measurement systems with improved dynamics, better overall performance and economical benefits
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