Obtention of pressures in the 10 −14 torr range by means of a ZrVFe non evaporable getter

Abstract

Pressures in the low 10 −14 torr range have been reproducibly achieved in a 3 m long vacuum chamber. Pumping was provided by a 400 I s −1 sputter-ion pump, a titanium sublimation pump and 43.5 m of a ZrVFe Non Evaporable Getter (NEG) strip. Activation of NEG has been passively achieved during the initial bakeout of the vacuum system. The pressure has been measured by means of a modified version of the Helmer gauge, designed and manufactured at CERN.