Observer-Based Sliding Mode Control for MEMS-based AC Voltage Reference Source

Abstract

Recently, studies on dynamics and control of Micro Electro Mechanical Systems (MEMS) has attracted control engineering researchers' attention, improving performance indexes, noise and disturbance rejection as well as handling of parametric uncertainties. This article objective is design of an observer-based sliding mode control (SMC) to improve tracking performance for the MEMS AC voltage reference sources (VRS). First off, a high gain observer for a nonlinear model of MEMS AC VRS is designed to estimate state variables of the system. The estimation speed of the states with the observer is so high that the observation error has no effect on the dynamical behaviour of this system. Secondly, SMC is put forth to ameliorate position tracking performance of the capacitive plate. The theory analysis and simulation yields demonstrate efficiency, robustness as well as optimality of the suggested controlling scheme for the tuneable capacitors in the MEMS AC voltage references. The simulation results are actually persuasive.