Abstract
Abstract In this paper, an extended state observer (ESO) being incorporated with the adaptive sliding mode control theory is proposed to deal with a nonlinear pneumatic servo system characterized with input dead-zone, unknown system function, and external disturbance. The ESO is used to estimate system state variables of the unknown nonlinear system; the adaptive law is employed to compensate for dead-zone system behavior. Positioning experiments based on the derived control strategy were performed. As one example of positioning results, the positioning accuracy with sub-micrometers range was verified for both forward and backward actuations with step commands of 3 mm. The control scheme provided in this paper that can significantly improve the positioning performance of a traditional pneumatic servo system is demonstrated.
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