Observations of argon emission lines used for fluorine atom actinometry in low power rf discharges

Abstract

Anomalous power and frequency dependences of some argon emission lines are observed in a low power rf discharge in a 2% admixture of argon in CF4. Frequency ranges from 0.12 to 13.56 MHz for pressures of 25 and 50 mTorr and 20 W power to the plasma. Power and frequency dependences of the 7504 Å line differ from those for the 6416 Å, 6871 Å, and 7126 Å lines. These differences and argon excitation cross sections are used to examine the validity of actinometry assumptions. The 6871 Å or 6416 Å lines work better under these conditions as actinometer references, while the 7504 Å seems preferable for etch plasmas.