Abstract

An ellipsometer with nanosecond time resolution is developed. The ellipsometer is a passive type single wavelength ellipsometer adopting a DOAP (division-of-amplitude photopolarimeter) configuration. Using the ellipsometer, the phase transformation of the Ge–Sb–Te (GST) alloy caused by a high power nanosecond pulsed laser was monitored in real time. The result indicates that the phase transformation is a two-step process—the fast nucleation-dominant stage followed by the slow anomalous grain growth stage, similar to the isothermal phase transition of GST in the temperature range of 120–145 °C.

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