Observation of stacking faults formed during homoepitaxial growth of p-type 4H-SiC

Abstract

Threading dislocations and their transformation into stacking faults (SFs) are observed in p-type 4H-SiC epitaxial layers by high voltage transmission electron microscope. Homoepitaxial growth and in situ aluminum doping of 4H-SiC epitaxial layers are carried out using the organosilicon precursor bistrimethylsilylmethane (C7H20Si2 and the metal-organic precursor trimethylaluminum (C3H9Al), and the free hole concentration of the most heavily aluminum-doped epitaxial layers is >1021 cm−3. Threading dislocations are formed at the interface between the epitaxial layer and the substrate. However, the density of these threading dislocations decreases toward the epitaxial layer surface with their transformations to SFs.