Observation of skipping motion and subsurface planar channeling of 30 keV H + ions on single crystal surfaces

Abstract

The angular distributions and the energy spectra of scattered H + ions at glancing angle incidence of 30 keV H + ions on the (001) surfaces of KC1 and SnTe single crystals are studied. It is concluded from the results that skipping motion of the ions occurs on the smooth surface of KC1, while subsurface planar channeling of the ions penetrating the surface at surface steps occurs on the rough surface of SnTe. On the smooth surface of SnTe, both skipping motion and subsurface planar channeling occur. From the angular distributions of the ions which have lost anomalous large energies at various angles of incidence it is possible to distinguish the skipping motion in which the distributions do not depend on the angle of incidence from the subsurface planar channeling in which the distributions depend on the angle of incidence.