Abstract
Precision micro-machining without cracks and with a narrow heat affected zone is highly required for the effective use of high-performance material. For this purpose, it is expected that the higher harmonics of Nd:YAG laser could perform the precision micro-machining by its high photon energy. However, even using harmonics of Nd:YAG laser, the heat affected zone is inevitable due to the plasma generation. In order to reduce the influence of plasma, it is important to understand the generation mechanism of plasma. Therefore, the laser induced plasma was observed by the high-speed shutter camera, and the influence of laser wavelength on machining characteristics was investigated.
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