Abstract
Micro-oxygen precipitates and their effects on thin gate oxide breakdown have been investigated using a crystal-originated-particle (COP)-free wafer and a low COP wafer. After two-step annealing and subsequent repolishing, regions containing micro-oxygen precipitates were observed inside and outside the oxidation-induced stacking fault (OSF) ring. Delta [Oi] and near-surface microdefects (NSMDs) in those regions showed a reverse trend. It appears that micro-oxygen precipitates show a different precipitation behavior from the anomalous oxygen precipitation (AOP) behavior in the conventional Czochralski (CZ) silicon wafer with the OSF ring. The oxide breakdown electrical field was degraded in almost the same region as that where micro-oxygen precipitates were revealed. This indicates that micro-oxygen precipitates can affect the degradation of gate oxide integrity (GOI).
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.