Abstract
AbstractGlow discharge sputtering on CuNi alloy surfaces is studied by optical emission spectroscopy and Auger electron spectroscopy. The relative intensity of Cu emission lines against Ni lines increases with a decrease in supplied power in very low wattage regions. These changes of the relative intensities principally depend on the sputtering parameters of constituent elements in CuNi alloy; that is, the preferential sputtering of copper. Surface analysis by Auger electron spectroscopy shows that when samples are sputtered by glow discharges in very low power operations, the deformation layer which has a nickel‐enriched composition exists on alloy surfaces. We discuss the effect of glow discharge sputterings on surface compositions using the two analytical methods described above.
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