Abstract
The characteristics of magnetic neutral loop discharge (NLD) plasma have been studied by measurement of a high voltage appearing at an antenna in RF circuit. Peak-to-peak voltage Vpp at the antenna coil supplying power into plasma varied depending on the configuration and strength of the magnetic field. By analysis of the measured Vpp using the equivalent circuit model, it is deduced quantitatively that the power deposited into plasma in NLD is larger than that deposited in inductively coupled plasma (ICP).
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