Abstract
Inductively coupled plasma (ICP) has been studied in a low-pressure argon gas (5 mTorr) by measuring radio frequency (RF) potential oscillation with an emissive probe and two-dimensional electron velocity distribution functions (EVDFs) with a directional analyzer. The ICP discharge was realized with one-turn antenna coil using a simple model for understanding its fundamental characteristics. The amplitude of RF potential oscillation decreased as the input power was increased leading to a mode conversion from capacitively coupled plasma (CCP) to ICP discharge. The two-dimensional EVDFs measurement suggests that the observed high energy electrons are radiated from the antenna coil.
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