Oblique Pyramid Microstructure-Patterned Flexible Sensors for Pressure and Visual Temperature Sensing.

Abstract

Flexible tactile sensors have garnered considerable attention in diverse fields. Among them, the sensors integrated with multifunctional tactile sensing features can simultaneously detect various stimuli, such as pressure and temperature, and are thus suitable for practical applications. However, integrating multiple sensor modalities within a solitary pixel invariably encounters various limitations encompassing interplay among disparate sensors, intricate structural design demands, and the complexities and high costs associated with fabrication. Herein, we harness a visual sensing mechanism to synergize with electric sensors, thereby realizing a tactile sensor reliant on thermochromic microstructures for simultaneous pressure and temperature sensing. The thermal distribution could be easily displayed by the color change of the sensor, avoiding inference between the sensing units, which is beneficial for low-cost mass fabrication. A capacitor sensor with dual-scale oblique pyramid microstructures in its dielectric layer is used for the pressure sensing function, resulting in improved sensitivity and an extended measurement range. This innovative tactile sensor design offers insights into tactile sensing mechanisms, paving the way for cost-effective, high-performance, and multimodal sensor fabrication.