Abstract
In this paper, we propose another technique for measuring thin film thickness using white light interference. It is based on analyzing only one fringe image taken at coating’s edge region and intentionally inclined sample. The zero-order white fringe positions and fringe frequency are determined by a digital image processing and a function fitting. The thin film thickness is calculated from the obtained data. Our simulated and experimental results on a home-made Mirau-type white light interference microscope have demonstrated the high accuracy and reliability of this method. The measurement results of the different thickness optical coatings showed a good agreement to those measured with ellipsometer and alpha step meter. The simplicity of the experimental set-up, vibration insensitivity and fast measuring speed are the other significant advantages of the proposed technique.
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