Abstract
Thermal ground testing is an accepted and frequently used method for simulating the aerodynamic heating of high speed flight vehicles. A numerical method based on a finite volume method for a quartz lamp heating system, used in thermal testing, is proposed. In this study, the unstructured finite-volume method (UFVM) for radiation has been formulated and implemented in a fluid flow solver GTEA on unstructured grids. For comparison and validation of the proposed method, a 2D furnace with cooling pipes was chosen. The results obtained from the proposed FVM agreed well with the exact solutions. Numerical results show that the quartz lamp can be simplified as a slat with the same temperature radiation source, and a simplified 2D thermal testing case was then simulated with the coupling effects of radiation, convection, and conduction heat transfer. Different temperature loading curves and ratios of intervals between the lamps and lamp length (l/s) were studied using the proposed method. The radiation heat flux on the metal surface was a wave-shaped curve. Comparing the different interval ratios, we found that the smaller the interval ratio, the larger the maximum value and the smaller the difference between the maximum and minimum heat flux.
Highlights
The quartz lamp heating system is widely used in industries and laboratories as a key part of rapid thermal processing (RTP) equipment or thermal testing
The finite volume method for the N-S equation is well covered in the literature, so we only give the discretization process of the radiation transfer equation (RTE)
When the quartz lamp temperature was less than 500 K, all temperature histories were the same
Summary
The quartz lamp heating system is widely used in industries and laboratories as a key part of rapid thermal processing (RTP) equipment or thermal testing. RTP is essential in the manufacturing of semiconductor devices such as integrated circuits, memories, or solar cells. They correspond to key stages in wafer production operations such as annealing (RTA), oxidation (RTO), or chemical vapor deposition (RTCVD) [1,2,3]. A quartz lamp heating system is the most used heating method for thermal testing because of its high efficiency (approximately 90%). Thermal ground testing is an accepted and frequently used method to simulate the aerodynamic heating of high speed flight vehicles. It is appropriate to study the structure fluid coupling transient heat transfer
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