Abstract
We design a new type of the micro flow sensor which can detect the wall shear stress and the flow direction. In the new type of the micro flow sensor configuration, the two sensing elements are arrayed on the silicon chip and also used as heater due to a self-heating of the elements for higher frequency response and miniaturization. The flow sensing elements are thermal sensitive thin film resistors fabricated on the silicon chip. The principle of the micro flow sensor is based on the convective heat transfer from the heated resistance to the surrounding fluid. The optimum spacing of the heaters is discussed by the numerical simulation of a two-dimensional low Reynolds number flow including the heat conduction within the chip. In the feasibility study the proposed micro flow sensor with 30% reduction in size is found to have higher sensitivity.
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