Abstract
The gas mixing effect in electron cyclotron resonance (ECR) ion sources provides a substantial increase of the current of high charge state ions. In order to understand the mechanism of the gas mixing effect, the effects of the support gas (O 2) on the ion (Ar) charge state distribution, the plasma potential, the potential dip, the average charge state, the electron scattering rate and the thermal electron density are studied numerically on the basis of a simple balance model. The dependence of the ion charge state distribution on the ion temperature is also calculated. Finally, we point out that it might be the combination of several factors that results in the gas mixing effect.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
