Numerical study on optimization of atmospheric pulse-modulated radio frequency discharges in the very high frequency range

Abstract

In this paper, we investigated the optimization of pulse-modulated radio frequency (rf) discharges in the range of very high frequency from 50 to 800 MHz by a fluid model. A very strong Peak Current in the First Period (PCFP) during the power-on phase can be observed only when the excitation frequency is large enough, usually larger than 50 MHz, and the reversal electric field near the anode due to the accumulation of electrons contributes greatly to the formation of this peak current from the simulation data. The highest electron temperature is achieved in the first period, while the largest electron density is usually obtained in the last period during the power-on phase. By increasing the duty cycle, the value of PCFP increases initially, then it reaches the peak value at a duty cycle of approximately 70%, and later it drops to the normal value generated in a continuous rf discharge, and the maximum electron temperature also shows the similar evolution. However, as the duty cycle is increased, the electron density is always enhanced during the power-on phase. According to the simulation results, the duty cycle and modulation frequency can be effectively applied to modulate and optimize the electron density and electron temperature for applications.