Numerical Study on Operation Optimization of Atmospheric Radio-Frequency Glow Discharges Modulated by Pulses

Abstract

In recent years, pulse-modulated radio frequency (RF) plasmas have gained considerable interest in applications due to the advantages in reducing gas temperature and power consumption. In this article, the optimizations of operation mode in atmospheric pulse modulation RF discharges are investigated by a 1-D fluid model. From simulation data, the breakdown voltage and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${{\alpha -{\gamma }}}$ </tex-math></inline-formula> mode transition voltage both decrease as the duty cycle increases; however, a minimum breakdown voltage can be observed while altering the modulation frequency at a constant duty cycle, and the transition voltage always increases with the modulation frequency. The underpinning physics of the operation regime in pulsed RF discharges is discussed in detail by investigating the effects of the duration of the power-on phase based on the computational results. Increasing the number of applied RF cycles during the power-on phase contributes greatly to the breakdown and mode transition. This study can effectively deepen the understanding of the effects of pulse modulation in RF discharges and suggest ways to further optimize the pulse-modulated RF discharges.