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Abstract
In this work involving an atmospheric dielectric barrier discharge system, the feasibility of independence control of key plasma parameters through strategic modulation of applied dual-frequency excitation sources is demonstrated. In this paper, a one-dimensional fluid model with semi-kinetic method has been used to investigate the discharge properties of atmospheric dielectric barrier discharge by using 200 kHz/13.56 MHz excitations. Bearing good consistency and coherence with experimental results, the electrical characteristics and typical electron dynamics are studied numerically. It is revealed that the application of the high frequency excitation can restrain the increment of the low frequency current component and is effective in preventing the discharge from transitioning to a filamentary mode. This method then suggests and enables possible approaches to obtain discharges with good stability in described DBD systems.
Highlights
When the discharge is sustained under the kHz excitation, the generated plasma exhibits characteristics of lower electron density, higher electron energy and shows greater ease in transiting to the non-uniform filamentary discharge regime,[13,14] which is more suitable for specific fields requiring high-energy but low-density electrons, such as Plasma Enhanced Chemical Vapor Deposition (PECVD),[15] fabrication of anti-reflective coatings for photovoltaic and other optical devices,[16] and formation of protective layers that serve as barriers to oxygen or water etc
The voltage amplitude of the low frequency (LF) source is fixed at V l=2200 V as a constant, and the voltage amplitude of the high frequency (HF) is varied to investigate the influence of HF component in the overall ratio on the discharge dynamics
In order to draw further insights into the discharge characteristics, we provide the propagation of the gas voltage, conduction current density, excitation intensity and electron absorption power with different HF voltages as shown in figure 2
Summary
The internal relation between the modulation of dual-frequency discharge conditions and the obtained plasma parameters can be revealed via numerical modeling which is exceedingly challenging to get from experimental work. In order to draw further insights into the discharge characteristics, we provide the propagation of the gas voltage, conduction current density, excitation intensity and electron absorption power with different HF voltages as shown in figure 2.
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