Numerical study of the characteristics of the ion and fast atom beams in an end-Hall ion source

Abstract

An end-Hall ion source is a cylindrical magnetized device of few centimeters in length able to generate an ion beam with a current of typically 1 A and ion energies in the range of 100 eV. This ion source does not use acceleration grids, has a relatively large ion beam divergence, and is well suited for ion assisted deposition processes. In this paper, a self-consistent two-dimensional quasi-neutral model of an end-Hall ion source is used to understand the parameters controlling the characteristics of the extracted. The model results underline the role of charge exchange collisions on beam properties. The calculated energy distribution functions reveal the existence of groups of slow ions and fast neutrals. Ion mean energy corresponds to roughly 60% of the discharge voltage, while the root mean square deviation from the mean energy corresponds to about 33% of the discharge voltage, as in experiments. The influence of the position of the electron emitting source on the ion angular distribution is also shown.