Abstract
The multipactor discharge is an avalanche-like increase of free electrons inside vacuum components of microwave devices. Its presence leads to destruction of ceramic RF windows, erosion of metallic structures and perforation of vacuum walls. Multipactor may occur when either a metallic gap or a dielectric surface is exposed to a high-frequency electric field under some favorable conditions. We consider statistical theory of the initial study of multipactor discharge on dielectric surface. On the base of this theory, computer program has been developed for simulation multipactor discharge on dielectric surface.
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