Abstract
Finite difference solution of the Boltzmann equation with BGK collision model has been developed for analyses of micro-scale flows. Unlike the Direct Simulation Monte Carlo (DSMC) method, the finite difference solution is expected to be free from any statistical noise even for lowspeed flows. In this paper, reliability of the solution is examined for micro channel flows at typical operating conditions of micro electro mechanical system (MEMS) devices. The fully developed velocity distributions are well compared with those predicted by the second order slip model and numerical solutions of the linearized Botzmann equation. The present is promising as the simulation tool for analyses of micro-scale flows.
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