Abstract
*A kinetic theory analysis is made of low-speed gas flows in microfluidic systems consisted of microchannels in series. The Boltzmann equation simplified by a collision model is solved by means of a finite difference approximation with the discrete ordinate method. For the evaluation of the present method the results for simple channels are compared with those from several different methods and available experimental data. Calculations are made for various microfluidic systems such as a sudden expansion, a sudden contraction, and a 90 degree bend. Nomenclature c A = collision frequency d = characteristic length of the flow field f = distribution function F = Maxwell-Boltzmann distribution , g h = reduced distribution functions Kn = Knudsen number λ = mean free path o = inlet condition d = exit condition
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