Numerical simulation of an inductively coupled discharge using an Eulerian Vlasov code

Abstract

The physics of an inductively coupled discharge, with the fully nonlinear electron and ion dynamics, is simulated with a kinetic Eulerian Vlasov code. By calculating self-consistently the electrostatic potential evolution on the wave timescale, important insight is gained into the generation of the longitudinal electrostatic field and currents at the second harmonic of the applied RF field, and on the oscillations of the different macroscopic quantities in response to this applied RF field. The generated second harmonic currents are more pronounced at lower frequency, in agreement with experimental observations.