Abstract
The trochoidal electron monochromator (TEM) has been investigated in numerical simulation using the SIMION 8.0 package. Electron trajectory calculations have been carried out for a large number of initial electrons. The electron energy distribution functions (EEDFs) of the TEM have been obtained from the simulations as functions of various monochromator parameters (magnetic field, electric field, geometry, acceleration potential). The influence of the parameters on the performance of the TEM has been discussed. Simulations have been compared with experimental results.
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