Abstract
The finite element method (FEM) for elastoplastic large strain was employed to study the indentation experiment of Al film on Si substrate by a rigid spherical indenter. Two relationships between the mechanical properties of the film and the specific values of the load–displacement curve have been obtained. Using a hybrid method that involves the combination of these two relationships with nanoindentation test, the hardening index and yield strength of the metal film can be determined.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
