Numerical Simulation and Press Molding of Glass Micro Devices

Abstract

Many kinds of optical glass devices are needed in various fields such as optics, biotechnology, medical care and so on. If an optical device such as an aspheric lens does not have a simple shape, and/or its size is micro-/nanometer scale, press molding should be carried out at a higher temperature than the glass transition temperature (Tg) to reduce cost and increase productivity. However, the most suitable conditions for glass molding are generally determined by performing many experiments. Consequently, it is useful to be able to predict the most suitable molding condition by numerical simulation. Press molding experiments and numerical simulation using finite element analysis, in relation to micro press molding of the borosilicate glasses Pyrex and D263, were carried out. Thermo-viscoelastic properties of the glasses were estimated using unidirectional compression creep testing according to traditional thermo-viscoelastic theory. Glass micro press molding was carried out with a glassy carbon die with a line and space pattern machined by a dicing saw. The optimum molding temperatures for accurate transcription of the die profile to the glass were investigated. Numerical simulation of micro press molding of the glass was carried out by the finite element method using universal FEM code (ANSYS ver.11.0). Experimental and numerical simulation results for the cross-section shape and the height of the groove profile were in approximate agreement.