Abstract
The present work proposes a novel MEMS capacitive accelerometer based microphone with enhanced sensitivity. The accelerometer design is simulated in COMSOL MULTIPHYSICS 4.2, and the complete model including the electronic detection system is implemented in SIMULINK. The accelerometer is proposed to serve as a microphone in the fully implantable hearing application which can be surgically implanted at the middle ear bone structure. Therefore, the design parameters such as size, weight and resonant frequency require deliberation. A novel analytical model considering the impact of the width of the microlever and the capacitive fringe effects on the performance of the sensor has been developed. The accelerometer is designed within a sensing area of 1 mm2 and accomplishes a nominal capacitance of 4.85 pF, an excellent capacitive sensitivity of 5.91 fF/g and voltage sensitivity of 11.2 mV/g.
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