Numerical performance analysis of quartz tuning fork-based force sensors

Abstract

Quartz tuning fork-based force sensors where one prong is immobilized onto a holder while the other one is allowed to oscillate freely (‘qPlus’ configuration) are in widespread use for high-resolution scanning probe microscopy applications. Due to the small size of the tuning forks (≈3 mm) and the complexity of the sensor assemblies, the reliable and repeatable manufacturing of the sensors has been challenging. In this paper, we investigate the contribution of the amount and location of the epoxy glue used to attach the tuning fork to its holder on the sensor’s performance. Towards this end, we use finite element analysis to model the entire sensor assembly and to perform static and dynamic numerical simulations. Our analysis reveals that increasing the thickness of the epoxy layer between prong and holder results in a decrease of the sensor’s spring constant, eigenfrequency, and quality factor while showing an increasing deviation from oscillation in its primary modal shape. Adding epoxy at the sides of the tuning fork also leads to a degradation of the quality factor even though in this case, spring constant and eigenfrequency rise in tandem with a lessening of the deviation from its ideal modal shape.