Numerical modeling of the electrical properties plasma argon in a RF magnetron sputtering and with Einstein's relation of electron diffusivity

Abstract

Numerical modeling of RF magnetron sputtering discharge of argon plasma properties, using a one-dimensional time-dependent fluid model in presence of the magnetic field, has been developed. The model is based on continuity equation and electron temperature equation coupled with Poisson’s equation. The electron mobility depends on magnetic field and the electron diffusivity is assumed to be dependent of electron energy by Einstein's relation. The flux is calculated by Scharfetter and Gummel schemes. Numerical simulations were resolved by using the Finite Volume Method (FVM) and the Thomas algorithm. The obtained results for the electrical properties, electron and ion densities, electrical potential, electric field and electron temperature, are in good agreement with previous works. A parametric study varying the magnetic field intensity on the discharge properties is done.