Numerical modeling and analysis of coaxial electrohydrodynamic jet printing

Abstract

Coaxial electrohydrodynamic jet (CE-Jet) printing is an encouraging method for fabrication of high-resolution micro and nanostructures in MEMS systems. This paper presents a novel simulation work based on phase field method which is considered as a precise technique in fluid dynamics. The study explores influence of various parameters such as applied voltage, needle-substrate distance, dynamic viscosity, relative permittivity, needle size and flow rate on stability and resolution of CE-Jet morphologies. The morphology of CE-Jet exhibits that width of cone-jet profile and printed structures on substrate were directly proportional to relative permittivity and flow rate. In addition, it was inversely proportional to dynamic viscosity and applied voltage. The study examine that CE-Jet length of inner liquid is inversely proportional to needle-substrate distance in same time. It was later verified in experimental study by producing stable CE-Jet morphology with 300 μm diameter using optimized parameters (i.e., DC voltage 7.0 kV and inner liquid flow rate 400 nl/min) as compared to other validation studies such as 400 μm and 500 μm. The CE-Jet printing technique investigates significant changes in consistency and stability of CE-Jet morphologies and makes Jet unique and comparable when adjustment accuracy reaches 0.01 mm. PZT sol line structures with a diameter of 1 µm were printed directly on substrate using inner needle (diameter of 120 µm). Therefore, it is considered as a powerful tool for nano constructs production in M/NEMS devices.