Abstract
The subject of this research was a chemical reactor for the producing tungsten coverings by means of chemical vapor deposition. The physical and mathematical model of viscous incompressible fluid motion and heat and mass transfer in a vortex chamber has been described. The velocity field, the temperature and the concentration distributions in a vortex chamber were obtained. Calculations reliability was verified by different methods. Parametric studies on effects of the Reynolds, Prandtl and Rossbi criteria on the flow characteristics were performed.
Highlights
The subject of this research was a chemical reactor for the producing tungsten coverings by means of chemical vapor deposition
The gas having axial velocity U0, temperature T0 and concentration C0 enters from the pipe in the center of chamber, and exits through the annual channel on the periphery of that
The top and the bottom of a vortex chamber are rotating with a constant angular velocity ω
Summary
In this paper the process of tungsten deposition from the tungsten hexafluoride and hydrogen mixture is considered. A susceptor with a temperature T1 fills a part of the bottom, the tungsten reduced deposits there In this model a binary mixture is considered, the first component of one is tungsten hexafluoride with hydrogen and the second component is hydrogen fluoride. By virtue of low velocities and temperature differences the fluid considered is incompressible, but density depends on concentration because component ratio changes during the reaction. The system of equations describing processes in a vortex chamber contains viscous incompressible fluid dynamics (1-3), mass conservation (4), energy (5) and mass transport (6) equations. It can be represented in dimensionless form in a cylindrical coordinates:
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