Numerical Investigation of Short-Channel Effects in Negative Capacitance MFIS and MFMIS Transistors: Subthreshold Behavior

Abstract

In this paper, we analyze the impact of length scaling on the ON-state operation of the two classes of double-gate negative capacitance transistors: metal–ferroelectric–metal–insulator–semiconductor (MFMIS) and metal–ferroelectric–insulator–semiconductor (MFIS). We show that for long-channel structures, MFMIS configuration shows a higher ON current than the MFIS due to a lower drain saturation voltage of the latter. For short-channel cases, we compare these negative capacitance field effect transistors (NCFETs) under two scenarios: equal flat band voltages (iso- ${V}_{\textsf {FB}}$ ) and equal OFF currents (iso- ${I}_{ \mathrm{\scriptscriptstyle OFF}}$ ). In iso- ${V}_{\textsf {FB}}$ condition, a higher negative differential conductance (NDC) effect in the MFMIS suppresses its ON current below that of the MFIS. However, the MFMIS provides a higher ON current than the MFIS for all the channel lengths under iso- ${I}_{ \mathrm{\scriptscriptstyle OFF}}$ condition. We further investigate the influence of quantum mechanical effects and velocity saturation of carriers on the electrical characteristics of short-channel NCFETs. We also explore the impact of inner and outer spacer fringings in NCFETs. We find that the ferroelectric voltage gain in NCFETs with spacers increases with the channel length scaling, which provides a further improvement in the ON current contrary to those without spacers. Moreover, increase in the spacer permittivity also boosts both the ON current and the NDC.