Abstract
A pallet structure with an annular slot is proposed in the perpendicular MOVPE chamber by electromagnetic heating Compared with the conventional pallet, the shape of the slot changes the directions of the thermal conduction in the pallet, which makes the temperature distribution of the substrate more uniform. The optimized pallet structure which makes the most uniform temperature profile of the substrate is also given. In addition, the intervals of the applied parameters such as the current frequency, current strength and coil turns which keep the stable change of the substrate temperature are also obtained, by analyzing the change of the substrate temperature with the parameters. When one of the parameters is changed in the interval, the temperature magnitude can be adjusted while ensuring a certain uniformity of the temperature. This is beneficial to control the growth of the thin film.
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