Numerical investigation into the characteristics of a vortex in an argon inductively coupled plasma

Abstract

A numerical simulation of a technical radio frequency inductively coupled plasma was made with three coils and coupled power in the range of 2–10 kW. The generator frequency varied from 1.76 to 13.56 MHz. The mechanisms of forming a vortex on the upstream side of the discharge and the influences of coupled power, generator frequency and flow rate of central gas on the vortex dimensions were studied. Special attention was paid to investigate two different kinds of vortex flow pattern—Benard and toroidal—as well as the vortex intensity under those two kinds of flow pattern. A critical flow rate of central gas, above which the flow pattern would transform from a Benard to a toroidal vortex, was found on the basis of force balance between the dynamic head of central cool gas and magneto-hydrodynamic and Stokes drag forces of plasma. The influences of coupled power, generator frequency, diameter of the injection probe and the compositions of central gas on the critical flow rate of the central gas were discussed. The dependences of the vortex intensity and maximum vorticity on the coupled power under different generator frequencies and flow rates of central gas were established.