Abstract
This paper investigates a kind of cylindrical linear single-axis actuator that is used in the magnetic levitation stage to provide fine movement. The magnetic flux density distribution due to the permanent magnet is determined using the surface charge method, and the magnitude of force generated by the actuator is calculated using the Lorentz force equation. Both of them can be solved by numerical integration. The results are verified by measurements. The magnetic force components are fitted as an analytical style that can be used in the real-time controlling of this actuator for the magnetic levitation stage.
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