Numerical calculation of the Fresnel diffraction patterns for periodic objects in measurements with a two-aperture radiometer

Abstract

We present numerical calculations of the Fresnel diffraction for periodic structures in an optical system with two apertures. In such a system, measurements are affected by the relation between the spatial frequency of the sample and the geometrical parameters involved (i.e., aperture diameters, radiometer-sample distance, in-plane rotation, and translation of the sample). This numerical calculation of the Fresnel diffraction enables us to establish criteria to choose the right geometrical parameters of the system to ensure invariance of the measurements when the sample is rotated or shifted. We use the theory of partial coherence to calculate the Fresnel diffraction through two successive apertures. By using the point spread function of the system, as in the theory of partial coherence, we avoid complicated statistical processes that are commonly used in this theory. We show some numerical results that verify our proposal.