Numerical Calculation of Light-Ion Backscattering in the Case of Normal Incidence on a Target Surface

Abstract

The distributions of backscattered ions over paths in the target are calculated numerically for different ion energies and different ratios of masses and target atoms. The calculations are performed by solving the one-velocity transport equation with a scattering cross section for a truncated Coulomb potential. The problem is reduced to the Chandrasekhar integral equation, which is solved using the method of successive approximations. The path distribution of backscattered ions obtained as a result of the inverse Laplace transformation has a characteristic cupola-shaped form with a maximum. Within the framework of the model of continuous energy losses, the path distributions are recalculated to obtain the ion reflection coefficients and compared with the SRIM simulation results.